Micro and Nanomanufacturing by Mark J. Jackson PDF

Product Details:

Author(s): Mark J. Jackson

Publisher: Springer

Category: Electrical Engineering

Date: 27.11.2006

Pages: 712

Language: English

ISBN-10: 387258744

ISBN-13: 9780387258744

Format: pdf

Book Description:

Product Description: This, the corrected second printing of Jacksons authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.

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